The platform included one glove box, Purification System and one set thermal evaporation & Magnetron Sputtering system. The glove box integrated with one thermal evaporation system.
Thermal Sources : 2 thermal sources
Sputter Sources : 2 Sputter sources with RF and DC power sources (separately)
Film thickness control system with four QCM sensors inputs, 0.1 Å / sec resolution
Water cooling system
Vacuum system
Ultimate Vacuum
Main vacuum chamber : Rectangle 304 SS, dimension: 400*400*450mm, Front door are fully automatic control, manual hinged back door ， viewport on the both
THERMAL EVAPORATION AND MAGNETRON SPUTTER SYSTEM WITH OPTIONAL GLOVEBOX INTEGRATION