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  • THERMAL EVAPORATION AND MAGNETRON SPUTTER SYSTEM WITH OPTIONAL GLOVEBOX INTEGRATION

   THERMAL EVAPORATION AND MAGNETRON SPUTTER SYSTEM WITH OPTIONAL GLOVEBOX INTEGRATION



The platform included one glove box, Purification System and one set thermal evaporation & Magnetron Sputtering system. The glove box integrated with one thermal evaporation system.

Thermal Sources : 2 thermal sources

Sputter Sources : 2 Sputter sources with RF and DC power sources (separately)

Film thickness control system with four QCM sensors inputs, 0.1 Å / sec resolution

Water cooling system

Vacuum system

Ultimate Vacuum

Main vacuum chamber : Rectangle 304 SS, dimension: 400*400*450mm, Front door are fully automatic control, manual hinged back  door , viewport on the both

THERMAL EVAPORATION AND MAGNETRON SPUTTER SYSTEM WITH OPTIONAL GLOVEBOX INTEGRATION

  • Product Code: FY-THRM/MAG-OPT-4GBS
  • Availability: In Stock
  • $0.00



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